Title
Near-Field Nano-Patterning Of 3D Structures
Abstract
A comprehensive and fully three-dimensional model was developed to simulate fabrication of structures formed by near-field nano-patterning. Simulations were compared to laboratory results for photonic crystals formed in a standard contact mask aligner under partiallycoherent light. © 2005 Optical Society of America.
Publication Date
1-1-2005
Publication Title
Optics InfoBase Conference Papers
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/fio.2005.fws2
Copyright Status
Unknown
Socpus ID
85088758240 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/85088758240
STARS Citation
Rumpf, Raymond C.; Srinivasan, Pradeep; and Johnson, Eric G., "Near-Field Nano-Patterning Of 3D Structures" (2005). Scopus Export 2000s. 4160.
https://stars.library.ucf.edu/scopus2000/4160