Title

A Novel Theoretical Model For Semiconductor Oxide Gas Sensor

Abstract

A new constitutive equation for the gas sensitivity of n-type semiconductor oxide thin film gas sensor has been proposed here based on a single-crystal model. The derived constitutive equation shows the dependence of the gas sensitivity on various critical parameters such as nanocrystallite size, space-charge-layer thickness, reducing gas concentration, bulk charge-carrier-concentration, surface-density of states, oxygen-ion-vacancy concentration, operating temperature, and film thickness. The present theoretical model is applicable to all n-type semiconductor oxides gas sensors. © 2005 Materials Research Society.

Publication Date

6-20-2005

Publication Title

Materials Research Society Symposium Proceedings

Volume

828

Number of Pages

161-166

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

20344401052 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/20344401052

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