Title

Effect Of Air-Pressure On Room Temperature Hydrogen Sensing Characteristics Of Nanocrystalline Doped Tin Oxide Mems-Based Sensor

Keywords

Air-pressure; Hydrogen; MEMS; Nanocrystalline; Sensor; Tin oxide

Abstract

Nanocrystalline indium oxide (In 2O 3)-doped tin oxide (SnO 2) thin film sensor has been sol-gel dipcoated on a microelectrochemical system (MEMS) device using a sol-gel dip-coating technique. Hydrogen (H 2) at ppm-level has been successfully detected at room temperature using the present MEMS-based sensor. The room temperature H 2 sensing characteristics (sensitivity, response and recovery time, and recovery rate) of the present MEMS-based sensor has been investigated as a function of air-pressure (50-600 Torr) with and without the ultraviolet (UV) radiation exposure. It has been demonstrated that, the concentration of the surface-adsorbed oxygen-ions (which is related to the sensor-resistance in air), the ppm-level H 2, and the oxygen (O 2) partial pressure are the three major factors, which determine the variation in the room temperature H 2 sensing characteristics of the present MEMS-based sensor as a function of air-pressure. Copyright © 2005 American Scientific Publishers All rights reserved.

Publication Date

12-1-2005

Publication Title

Journal of Nanoscience and Nanotechnology

Volume

5

Issue

11

Number of Pages

1864-1874

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1166/jnn.2005.429

Socpus ID

28644435755 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/28644435755

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