Title

Reliable Super Resolution Beam Profiler For Lasers In Manufacturing

Abstract

Demonstrated is a first of a kind hybrid analog-digital laser beam profiler based on a Digital Micro-Mirror Device. Tests at 1550 nm show a 2 micron profiling resolution over a 600 micron side square zone. © 2004 Optical Society of America.

Publication Date

1-1-2005

Publication Title

Optics InfoBase Conference Papers

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84899142582 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84899142582

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