Title

Reliable Super Resolution Beam Profiler For Lasers In Manufacturing

Abstract

Demonstrated is a first of a kind hybrid analog-digital laser beam profiler based on a Digital Micro-Mirror Device. Tests at 1550 nm show a 2 micron profiling resolution over a 600 micron side square zone. © 2004 Optical Society of America.

Publication Date

1-1-2005

Publication Title

2005 Conference on Lasers and Electro-Optics, CLEO

Volume

3

Number of Pages

1885-1887

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/cleo.2005.202308

Socpus ID

30944436539 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/30944436539

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