Title

Passive Millimeter-Wave Focal Plane Array

Abstract

We built and tested a low-cost 8-by-8 millimeter-wave focal plane array using antenna-coupled micro-bolometers. The array consists of slot antennas coupled to nickel bolometers and was fabricated using optical lithography on high-resistivity silicon wafers. The measured noise equivalent temperature difference (NETD) of an individual element was 450 K. Simulation results corresponded with observed device performance. An improved design was then implemented using a square spiral antenna. We discuss the fabrication of this type of array element, include some modeling results, and present the methods and results of our measurements.

Publication Date

12-2-2004

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

5410

Number of Pages

202-209

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.542753

Socpus ID

8844259787 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/8844259787

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