Title

Passive Millimeter-Wave Focal Plane Array

Abstract

We built and tested a low-cost 8-by-8 millimeter-wave focal plane array using antenna-coupled micro-bolometers. The array consists of slot antennas coupled to nickel bolometers and was fabricated using optical lithography on high-resistivity silicon wafers. The measured noise equivalent temperature difference (NETD) of an individual element was 450 K. Simulation results corresponded with observed device performance. An improved design was then implemented using a square spiral antenna. We discuss the fabrication of this type of array element, include some modeling results, and present the methods and results of our measurements. © 2004 IEEE.

Publication Date

12-1-2004

Publication Title

Conference Digest of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics

Number of Pages

745-746

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

16244423693 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/16244423693

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