Title
Microlens Fabrication Using An Etched Glass Master
Abstract
This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C 4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses. © Springer-Verlag 2007.
Publication Date
2-1-2007
Publication Title
Microsystem Technologies
Volume
13
Issue
3-4
Number of Pages
339-342
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1007/s00542-006-0217-9
Copyright Status
Unknown
Socpus ID
33845771831 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/33845771831
STARS Citation
Zhang, P.; Londe, G.; Sung, J.; Johnson, E.; and Lee, M., "Microlens Fabrication Using An Etched Glass Master" (2007). Scopus Export 2000s. 6952.
https://stars.library.ucf.edu/scopus2000/6952