Title

Microlens Fabrication Using An Etched Glass Master

Abstract

This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C 4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses. © Springer-Verlag 2007.

Publication Date

2-1-2007

Publication Title

Microsystem Technologies

Volume

13

Issue

3-4

Number of Pages

339-342

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1007/s00542-006-0217-9

Socpus ID

33845771831 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33845771831

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