Title
Study Of Design Parameters In Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles
Abstract
We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In2O3) doped polycrystalline tin dioxide (SnO2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).
Publication Date
1-1-2007
Publication Title
ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume
11
Number of Pages
541-544
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1115/IMECE200743803
Copyright Status
Unknown
Socpus ID
84928610022 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84928610022
STARS Citation
Zhang, P.; Deshpande, S.; Medelius, P. J.; Seal, S.; and Cho, H. J., "Study Of Design Parameters In Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles" (2007). Scopus Export 2000s. 7157.
https://stars.library.ucf.edu/scopus2000/7157