Title

Study Of Design Parameters In Hydrogen Microsensors Integrated With Metal Semiconductor Nanoparticles

Abstract

We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In2O3) doped polycrystalline tin dioxide (SnO2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).

Publication Date

1-1-2007

Publication Title

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volume

11

Number of Pages

541-544

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1115/IMECE200743803

Socpus ID

84928610022 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84928610022

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