Title

Guided-Wave Optical Switch Controlled By A Micro-Electro-Mechanical Cantilever

Abstract

A micro-electro-mechanical (MEM) actuated integrated optic switch is reported which is fabricated on a silicon substrate and is capable of moderate scale integration. The switching action is based on electro-static bending of a cantilever arm containing two vertically aligned waveguides. The device is tested using a cw Ti: sapphire laser that is an end-fire coupled into the lower input waveguide. It is shown that a 'pull-in' voltage of 85V is required to bend the cantilever beam down and hence activate the switch.

Publication Date

12-1-2000

Publication Title

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volume

1

Number of Pages

50-51

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0034482193 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0034482193

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