Title

Integrated Optical Sensor Platform Based On Evanescent Field Coupling For Biochemical Sensor Applications

Abstract

A photodetector integrated waveguide platform for diverse types of evanescent-wave sensor applications has been developed. Using this platform, surface plasmon resonance (SPR) detection has been demonstrated. The waveguide was made of SU-8 polymer as a guiding layer and siliconoxynitride (SiO xNy) as a cladding layer. The metal-semiconductor-metal (MSM) type photodetector coupled to the waveguide provides flexibility in design and fabrication compared to a pin (p-intrinsic-n) photodetector. We present a universal sensor architecture that can be used for evanescent-field based interrogation with (a) controllable refractive index and (b) integrated opto-electric signal conversion. © 2006 IEEE.

Publication Date

12-1-2006

Publication Title

Proceedings of IEEE Sensors

Number of Pages

1489-1492

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ICSENS.2007.355916

Socpus ID

50149094691 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/50149094691

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