Title

On-Chip Electrostatic Discharge Protection For Cmos Gas Sensor Systems-On-A-Chip (Soc)

Abstract

An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectromechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for (1) the input/output (I/O) protection, (2) the power supply clamp, and (3) the internal sensors' electrodes during the micromachining process. The ESD structure developed demonstrates a leakage current below 10-10 A, high on-state conductance, and high level of human body model (HBM) immunity. © 2006 Elsevier Ltd. All rights reserved.

Publication Date

8-1-2006

Publication Title

Microelectronics Reliability

Volume

46

Issue

8

Number of Pages

1285-1294

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.microrel.2005.12.002

Socpus ID

33746189562 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33746189562

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