Title

Micromachined Nanocrystalline Silver Doped Sno2 H2S Sensor

Keywords

Hydrogen sulfide; MEMS; Nanocrystalline SMO; Sol-gel; Tin dioxide

Abstract

An ultrahigh sensitive hydrogen sulfide gas sensor was developed utilizing micromachined nanocrystalline SnO2-Ag on ceramic wafer (alumina). A polymeric sol-gel process has been successfully developed in fabricating thin film SnO2-Ag nanocomposite, which shows excellent sensing characteristics upon exposure to H2S as low as 1 ppm at working temperature as low as 70 °C. This sensor also shows higher sensitivity to H2S under various humidity conditions, in comparing to commercialized H2S sensors as well as published data. The environmental influences on sensor's sensitivity and selectivity have been tested and discussed. The results show that the sensor has a good selectivity due to its less sensitive to common interference gases like Cl2, HCl, SO2, C 6H14, CH4, CO, C3H8, etc. © 2005 Elsevier B.V. All rights reserved.

Publication Date

3-30-2006

Publication Title

Sensors and Actuators, B: Chemical

Volume

114

Issue

1

Number of Pages

32-39

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.snb.2005.04.035

Socpus ID

33244456360 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33244456360

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