Title

Temperature Feedback Control For Improving The Stability Of A Semiconductor-Metal-Oxide (Smo) Gas Sensor

Keywords

Feedback temperature control; Microelectromechanical systems (MEMS); Semiconductor-metal-oxide (SMO) sensor; Sol gel

Abstract

Stability is a major concern of semiconductor-metal-oxide (SMO) gas sensors in practical applications, as they may cause false alarm problems. Ambient temperature is a major factor affecting the SMO gas sensor's stability. In this paper, we use a novel way to improve temperature stability of SMO (tin oxide) gas sensors by applying a temperature feedback control circuits which are compatible with our microelectromechanical systems senor fabrication. A built-in platinum temperature sensor can precisely detect the sensor's working temperature. It provides feedback information to compensate the microheater's current to maintain the sensor's working temperature constant, regardless of ambient temperature change. Test results showed that, with this approach, significant improvement of stability has been achieved compared to SMO gas sensors without temperature compensation under the same ambient variation. The algorithm is realized through a hardware circuit, whose advantages include real time, large feedback gain, and low cost. © 2005 IEEE.

Publication Date

2-1-2006

Publication Title

IEEE Sensors Journal

Volume

6

Issue

1

Number of Pages

139-145

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/JSEN.2005.844353

Socpus ID

31144431912 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/31144431912

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