Title

An Analytical Model For Conveyor Based Amhs In Semiconductor Wafer Fabs

Abstract

This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the work-in-process on the conveyor and assess the system stability. The analysis approach is based on a queuing model, but takes into account details of the operation of the AMHS including turntables. A numerical example is provided to demonstrate and validate the queuing model over a wide range of operating scenarios. The results indicated that the analytical model estimates the expected work-in-process on the conveyor with reasonable accuracy.© 2008 IEEE.

Publication Date

12-1-2008

Publication Title

Proceedings - Winter Simulation Conference

Number of Pages

2148-2155

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/WSC.2008.4736313

Socpus ID

60749108614 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/60749108614

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