Title

Throughput Performance Analysis For Closed-Loop Vehicle-Based Material Handling Systems

Keywords

Blocking; Markov chains; Material handling; Semiconductor manufacturing

Abstract

A computationally effective analysis of the throughput performance of a closed-loop multi-vehicle automated material handling system (AMHS) used in highly automated 300 mm wafer fabrication facilities (fabs) is presented. A probabilistic model is developed, based on a detailed description of AMHS operations, and the system is analyzed as an extended Markov chain. The model represents vehicle operations on the closed-loop considering the possibility of vehicle blocking. This analysis provides essential parameters such as the vehicle blocking probabilities and the throughput capacity of the AMHS. A numerical example is analyzed and simulated using AutoMod to demonstrate and validate the stochastic model.

Publication Date

9-12-2008

Publication Title

IIE Transactions (Institute of Industrial Engineers)

Volume

40

Issue

11

Number of Pages

1097-1106

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1080/07408170802167647

Socpus ID

51249112270 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/51249112270

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