Title

Micro-Machinable Polymer-Derived Ceramic Sensors For High-Temperature Applications

Keywords

High temperature micro-sensor; Micro-machining; Polymer-derived ceramics

Abstract

Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800°C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics. © 2010 Copyright SPIE - The International Society for Optical Engineering.

Publication Date

6-18-2010

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7647

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.848529

Socpus ID

77953506527 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/77953506527

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