Title

Optical Characterization Of Bcn Films Deposited At Various N2/Ar Gas Flow Ratios By Rf Magnetron Sputtering

Keywords

Band gap; BCN; Optical properties; Sputtering

Abstract

We present the deposition and optical characterization of amorphous thin films of boron carbonitride (BCN). The BCN thin films were deposited in a radio frequency magnetron sputtering system using a B4C target. Films of different compositions were deposited by varying the ratio of argon and nitrogen gas in the sputtering ambient. X-ray photoelectron spectroscopy was used to perform surface characterization of the deposited films and a change in composition with nitrogen flow ratio was observed. The effect of gas flow ratios on the optical properties of the films was also investigated. It was found that the transmittance of the films increases with nitrogen incorporation. The optical band gap of the films ranged from 2.0 eV to 3.1 eV and increased with N2/Ar gas flow ratio except at the highest ratio. © 2011 Elsevier B.V. All rights reserved.

Publication Date

7-25-2011

Publication Title

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volume

176

Issue

12

Number of Pages

878-882

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.mseb.2011.05.010

Socpus ID

79959688567 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/79959688567

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