Title

Effect Of Substrate Temperature On Optical Properties Of Bcn Thin Films

Abstract

The amorphous boron-carbon-nitrogen (BCN) thin films were prepared by RF magnetron sputtering from a B4C target in argon and nitrogen gas ambient. The substrate temperature was varied from room temperature to 500C. The structural and bonding characteristics were studied by X-ray photoelectron spectroscopy (XPS) and the optical properties were characterized by UV-Visible spectrophotometer. For different substrate temperatures, the optical band gaps (Eopt) ranged from 3.5-4.8 eV and refractive index were in the range of 2.66-1.5. The reported band gap values are significantly higher than the band gap values usually reported elsewhere in the literature for sputter deposited BCN thin films. © 2011 The Electrochemical Society.

Publication Date

8-18-2011

Publication Title

Electrochemical and Solid-State Letters

Volume

14

Issue

10

Number of Pages

-

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1149/1.3610430

Socpus ID

80051621093 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/80051621093

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