Title

Effect Of Sputtering Process Parameters On Film Properties Of Molybdenum Back Contact

Keywords

Kinetic Monte Carlo; Off lattice; Pattern recognition; Self learning; Surface diffusion; Thin film growth

Abstract

We report the development of a pattern-recognition scheme for the off-lattice self-learning kinetic Monte Carlo (KMC) method, one that is simple and flexible enough that it can be applied to all types of surfaces. In this scheme, to uniquely identify the local environment and associated processes involving three-dimensional (3D) motion of an atom or atoms, space around a central atom is divided into 3D rectangular boxes. The dimensions and the number of 3D boxes are determined by the accuracy with which a process needs to be identified and a process is described as the central atom moving to a neighboring vacant box accompanied by the motion of any other atom or atoms in its surrounding boxes. As a test of this method to we apply it to examine the decay of 3D Cu islands on the Cu(100) and to the surface diffusion of a Cu monomer and a dimer on Cu(111) and compare the results and computational efficiency to those available in the literature. © 2012 Elsevier Inc.

Publication Date

5-1-2012

Publication Title

Solar Energy Materials and Solar Cells

Volume

100

Issue

9

Number of Pages

1-5

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.solmat.2011.11.038

Socpus ID

84857794903 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84857794903

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