Title

Micro-Ring Optical Resonators Fabricated By Selective Oxidation Of Refractory Metals (Sorm)

Abstract

A novel platform for integrated photonic circuits is proposed based on selective oxidation of refractory metals (SORM). Low-loss tantalum pentoxide coupled micro-ring optical resonators and high-index contrast ridge waveguides are demonstrated based on this platform. © 2013 OSA.

Publication Date

8-8-2013

Publication Title

2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference, OFC/NFOEC 2013

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84881055788 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84881055788

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