Title

Micro-Ring Optical Resonators Fabricated By Selective Oxidation Of Refractory Metals (Sorm)

Abstract

A novel platform for integrated photonic circuits is proposed based on selective oxidation of refractory metals (SORM). Low-loss tantalum pentoxide coupled micro-ring optical resonators and high-index contrast ridge waveguides are demonstrated based on this platform. © 2013 OSA.

Publication Date

1-1-2013

Publication Title

Optical Fiber Communication Conference, OFC 2013

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/ofc.2013.otu3c.5

Socpus ID

84887533779 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84887533779

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