Title
Mems Clocking-Cantilever Thermal Detector
Keywords
bimorph; infrared; MEMS; thermal
Abstract
We present performance calculations for a MEMS cantilever device for sensing heat input from convection or radiation. The cantilever deflects upwards under an electrostatic repulsive force from an applied periodic saw-tooth bias voltage, and returns to a null position as the bias decreases. Heat absorbed during the cycle causes the cantilever to deflect downwards, thus decreasing the time to return to the null position. In these calculations, the total deflection with respect to absorbed heat is determined and is described as a function of time. We present estimates of responsivity and noise. © 2013 SPIE.
Publication Date
9-17-2013
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume
8704
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1117/12.2018102
Copyright Status
Unknown
Socpus ID
84883748078 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84883748078
STARS Citation
Smith, Evan; Boroumand, Javaneh; Rezadad, Imen; Figueiredo, Pedro; and Nath, Janardan, "Mems Clocking-Cantilever Thermal Detector" (2013). Scopus Export 2010-2014. 6260.
https://stars.library.ucf.edu/scopus2010/6260