Title

Laser-Based Plasma Sources At 6.6 And 60 Nm

Abstract

Potential high power laser-based xenon and terbium plasma sources are identified based on the reflectivity profiles of the available LaN/B4C, LaN/B, and Al/Yb/Sio multilayer mirrors for applications such as surface processing and semiconductor industry. © 2013 Optical Society of America.

Publication Date

11-18-2013

Publication Title

CLEO: Science and Innovations, CLEO_SI 2013

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84887553901 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84887553901

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