Title

Laser-Based Plasma Sources At 6.6 And 60 Nm

Abstract

Potential high power laser-based xenon and terbium plasma sources are identified based on the reflectivity profiles of the available LaN/B4C, LaN/B, and Al/Yb/Sio multilayer mirrors for applications such as surface processing and semiconductor industry. © 2013 The Optical Society.

Publication Date

1-1-2013

Publication Title

2013 Conference on Lasers and Electro-Optics, CLEO 2013

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84903763253 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84903763253

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