Title
High-Q Lithium Niobate Microring-Resonators On Silicon
Abstract
Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate. © 2013 The Optical Society.
Publication Date
1-1-2013
Publication Title
2013 Conference on Lasers and Electro-Optics, CLEO 2013
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/cleo_si.2013.ctu1f.3
Copyright Status
Unknown
Socpus ID
84903790253 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84903790253
STARS Citation
Rabiei, Payam; Ma, Jichi; Chiles, Jeff; Khan, Saeed; and Fathpour, Sasan, "High-Q Lithium Niobate Microring-Resonators On Silicon" (2013). Scopus Export 2010-2014. 7521.
https://stars.library.ucf.edu/scopus2010/7521