Title

High-Q Lithium Niobate Microring-Resonators On Silicon

Abstract

Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate. © OSA 2013.

Publication Date

11-18-2013

Publication Title

CLEO: Science and Innovations, CLEO_SI 2013

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84887441993 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84887441993

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