Title

Characterization Of Metal Oxide Sensor Thin Films Deposited By Spray Pyrolysis

Keywords

Spray pyrolysis; Structure; Thin films; ZnO

Abstract

Chemical Spray Pyrolysis (CSP) of ZnO and SnO2 is of interest for gas sensor applications. The structural properties of the deposited film can be strongly influenced by deposition conditions. In this work, two solutions consisting of Tin Chloride and Zinc Chloride was sprayed on a heated substrate, where temperature was varied from 400° C to 450° C for ZnO, and from 350° C to 500° C for SnO2. X-ray diffraction and scanning electron microscopy, indicating a non-homogenous-structured film formed at low temperature for both oxides. At 450° C, a porous structure is observed for SnO2. This structure becomes homogenous at higher temperature. It was also found that at temperatures lower than 450° C, substrate temperature has significant impact on the composition of the synthesized films. Copyright © 2013 by ASME.

Publication Date

1-1-2013

Publication Title

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volume

10

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1115/IMECE2013-65136

Socpus ID

84903472071 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84903472071

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