Title
High-Performance, High-Index-Contrast Chalcogenide Glass Photonics On Silicon And Unconventional Non-Planar Substrates
Keywords
Chalcogenide glasses; Flexible photonics; High-index-contrast; Thermal nanoimprinting
Abstract
This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra-high quality factor of 4 × 105 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub-micrometer nanoimprinting of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Publication Date
1-1-2014
Publication Title
Advanced Optical Materials
Volume
2
Issue
5
Number of Pages
478-486
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1002/adom.201300489
Copyright Status
Unknown
Socpus ID
84900448279 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84900448279
STARS Citation
Zou, Yi; Zhang, Danning; Lin, Hongtao; Li, Lan; and Moreel, Loise, "High-Performance, High-Index-Contrast Chalcogenide Glass Photonics On Silicon And Unconventional Non-Planar Substrates" (2014). Scopus Export 2010-2014. 9786.
https://stars.library.ucf.edu/scopus2010/9786