Title

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics On Silicon And Unconventional Non-Planar Substrates

Keywords

Chalcogenide glasses; Flexible photonics; High-index-contrast; Thermal nanoimprinting

Abstract

This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra-high quality factor of 4 × 105 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub-micrometer nanoimprinting of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Publication Date

1-1-2014

Publication Title

Advanced Optical Materials

Volume

2

Issue

5

Number of Pages

478-486

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1002/adom.201300489

Socpus ID

84900448279 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84900448279

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