Extremely Low-Loss Chalcogenide Photonics Devices With Chlorine-Based Plasma Etching

Keywords

Etching; Films; Glass; Optical ring resonators; Optical waveguides; Photonics; Propagation losses

Abstract

Chlorine-based plasma is employed to produce extremely low propagation loss as low as 0.42 dB/cm in chalcogenide waveguides, record-high intrinsic Q-factors of 450,000 microring resonators and fiber-to-waveguide grating couplers with a coupling efficiency of 37%.

Publication Date

8-10-2015

Publication Title

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volume

2015-August

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84954069229 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84954069229

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