Dual Band Sensitivity Enhancements Of A Vox Microbolometer Array Using A Patterned Gold Black Absorber

Abstract

Infrared-absorbing gold black has been selectively patterned onto the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves much of gold black's high absorptance. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. For our fabricated devices, infrared responsivity is improved 22% in the long-wave IR and 70% in the mid-wave IR by the gold black coating, with no significant change in detector noise, using a 300°C blackbody and 80 Hz chopping rate. The increase in the time constant caused by the additional mass of gold black is ∼15%.

Publication Date

3-10-2016

Publication Title

Applied Optics

Volume

55

Issue

8

Number of Pages

2071-2078

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.55.002071

Socpus ID

84962129229 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84962129229

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