Responsivity Improvements For A Vanadium Oxide Microbolometer Using Subwavelength Resonant Absorbers

Keywords

LWIR; MEMS; metamaterial absorber; VO microbolometer x

Abstract

Subwavelength resonant structures designed for long-wave infrared (LWIR) absorption have been integrated with a standard vanadium-oxide microbolometer. Dispersion of the dielectric refractive index provides for multiple overlapping resonances that span the 8-12 μm LWIR wavelength band, a broader range than can be achieved using the usual quarter-wave resonant cavity engineered into the air-bridge structures. Experimental measurements show a 49% increase in responsivity for LWIR and a 71% increase across a full waveband as compared to a similar device designed for only LWIR absorption, using a 300°C blackbody at 35 Hz chopping rate. Increased thermal time constant due to additional mass is shown to lessen this enhancement at higher chopping rates.

Publication Date

1-1-2016

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

9819

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2223954

Socpus ID

84982083029 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84982083029

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