Vanadium Oxide Thin Film By Aqueous Spray Deposition

Keywords

dielectric properties; film; phase transformation

Abstract

Vanadium Oxide has application to infrared bolometers due to high temperature coefficient of resistivity (TCR). It has attracted interest for switchable plasmonic devices due to its metal to insulator transition near room temperature. We report here the properties of vanadium oxide deposited by an aqueous spray process. The films have a ropy surface morphology with ∼70 nm surface roughness. The polycrystalline phase depends on annealing conditions. The films have TCR of ∼2%/deg, which compares well with sputtered films. Only weak evidence is found for an insulator-metal phase transition in these films.

Publication Date

1-1-2018

Publication Title

MRS Advances

Volume

3

Issue

45-46

Number of Pages

2777-2782

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1557/adv.2018.512

Socpus ID

85053593893 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85053593893

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