Title

Modeling short channel effect on high-k and stacked-gate MOSFETs

Authors

Authors

J. Zhang; J. S. Yuan;Y. Ma

Abbreviated Journal Title

Solid-State Electron.

Keywords

short channel effect; high-k stacked layer; threshold voltage; deep; submicron; gate dielectrics; surface roughness; DIELECTRICS; Engineering, Electrical & Electronic; Physics, Applied; Physics, ; Condensed Matter

Abstract

The roll-off of threshold voltage in deep submicron MOSFETs with high-k and stacked gate dielectrics is studied. A model to account for the fringing field effect on the high-k slacked layer dielectrics is proposed. The model predictions are compared with the two-dimensional device simulation. Good agreement between the model predictions and device simulation results has been obtained. (C) 2000 Elsevier Science Ltd. All rights reserved.

Journal Title

Solid-State Electronics

Volume

44

Issue/Number

11

Publication Date

1-1-2000

Document Type

Article

Language

English

First Page

2089

Last Page

2091

WOS Identifier

WOS:000165546700029

ISSN

0038-1101

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