Fabrication of ZnO nanorod-based hydrogen gas nanosensor

    Authors

    O. Lupan; G. Chai;L. Chow

    Comments

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    Abbreviated Journal Title

    Microelectron. J.

    Keywords

    nanoscale materials and structures; nanofabrication; gas sensor; hydrogen; ZnO branched nanorod; ROOM-TEMPERATURE HYDROGEN; SENSING CHARACTERISTICS; SENSORS; NANOSTRUCTURES; NANOWIRES; FILMS; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology

    Abstract

    We report a first work on nanofabrication of hydrogen nanosensor from single ZnO branched nanorods (tripod) using in-situ lift-out technique and performed in the chamber of focused ion beam (FIB) system. Self-assembled ZnO branched nanorod has been grown by a cost-effective and fast synthesis route using an aqueous solution method and rapid thermal processing. Their properties were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy, and micro-Raman spectroscopy. These analyses indicate high quality ZnO nanorods. Furthermore, our synthesis technique permits branched nanorods to be easily transferred to other substrates. This flexibility of substrate choice opens the possibility of using FIB system for handling. The main advantage of the proposed in-situ approach is a controllable lift-out procedure which permitted us to obtain a 90% success rate for building nanodevices. The fabricated nanosensor uses only single self-assembled ZnO branched nanorod (tripod) to gauge the 150 ppm H-2 in the air at room temperature. The hydrogen sensitivity is in the range of 0.6-2% depending on which two branches to use. The nanosensor has selectivity against other gases such as O-2, CH4, CO and LPG, which shows sensitivity of < 0.02%. The single ZnO branched nanorod sensor can operate at low power of < 5 mu W. (C) 2007 Elsevier Ltd. All rights reserved.

    Journal Title

    Microelectronics Journal

    Volume

    38

    Issue/Number

    12

    Publication Date

    1-1-2007

    Document Type

    Article

    Language

    English

    First Page

    1211

    Last Page

    1216

    WOS Identifier

    WOS:000251983400015

    ISSN

    0026-2692

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