Title

Self-protection capability of integrated NLDMOS power arrays in ESD pulse regimes

Authors

Authors

B. Aliaj; V. A. Vashchenko; A. Shibkov;J. J. Liou

Comments

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Abbreviated Journal Title

Microelectron. Reliab.

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied

Abstract

This paper provides a review of most recent cycle of studies of NLDMOS-based power arrays, their operation in ESD regimes, self-protection capability as well as the methods and measures to improve the array robustness on the device structure, layout architecture and array composition levels. Effective practices of improving ESD robustness at the cell level and backend level are presented followed by topology optimization. Discussion is based upon ESD characterization supported both by device-circuit mixed-mode and 2.5D array level simulations data. (C) 2011 Elsevier Ltd. All rights reserved.

Journal Title

Microelectronics Reliability

Volume

51

Issue/Number

12

Publication Date

1-1-2011

Document Type

Article

Language

English

First Page

2015

Last Page

2030

WOS Identifier

WOS:000298721500001

ISSN

0026-2714

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