Title

Solution Processing and Resist-Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic-Organic Hybrid Photonic Integration

Authors

Authors

Y. Zou; L. Moreel; H. T. Lin; J. Zhou; L. Li; S. Danto; J. D. Musgraves; E. Koontz; K. Richardson; K. D. Dobson; R. Birkmire;J. J. Hu

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Adv. Opt. Mater.

Keywords

OPTICAL WAVE-GUIDES; IMPRINT LITHOGRAPHY; TE SYSTEM; SB-S; SURFACE; CIRCUITS; GRATINGS; ROLL; Materials Science, Multidisciplinary; Optics

Abstract

Organic polymer materials are widely credited with extreme versatility for thin film device processing. However, they generally lack the high refractive indices of inorganic semiconductors essential for tight optical confinement in planar integrated photonic circuits. Inorganic-organic hybrid photonic systems overcome these limits by combining both types of materials, although such hybrid integration remains challenging given the vastly different properties of the two types of materials. In this paper, a new approach is used to realize inorganic-organic hybrid photonics using chalcogenide glass (ChG) materials. Known as an amorphous semiconductor, the glass possesses high refractive indices, and can be prepared in a thin film form through solution deposition and patterned via direct thermal nanoimprinting, processing methods traditionally exclusive to polymer materials only. Sub-micrometer waveguides, microring resonators, and diffraction gratings fabricated from solution processed (SP) ChG films can be monolithically integrated with organic polymer substrates to create mechanically flexible, high-index-contrast photonic devices. The resonators exhibit a high quality factor (Q-factor) of 80 000 near 1550 nm wavelength. Free-standing, flexible ChG gratings whose diffraction properties can be readily tailored by conformal integration on nonplanar surfaces are also demonstrated.

Journal Title

Advanced Optical Materials

Volume

2

Issue/Number

8

Publication Date

1-1-2014

Document Type

Article

DOI Link

http://dx.doi.org/10.1002/adom.201400068

Language

English

First Page

759

Last Page

764

WOS Identifier

WOS:000341180400009

ISSN

2195-1071

Recommended Citation

"Solution Processing and Resist-Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic-Organic Hybrid Photonic Integration" (2014). Faculty Bibliography 2010s. 6376.
https://stars.library.ucf.edu/facultybib2010/6376