Keywords

semiconductors, MEMS, electronics, reliability, space, materials

Abstract

The purpose of this study is to analyze aluminum nitride (AlN) micro-electromechanical systems (MEMS) resonators designed for extreme-environment applications. The devices of study are Lamb wave, piezoelectric resonators designed and fabricated using conventional semiconductor manufacturing processes and operating around various frequencies in the megahertz range. The purpose of this study is to advance understanding of MEMS devices in extreme-temperature and radiated environments for outer-space applications.

Devices were tested under vacuum at temperatures ranging from room temperature (~21°C) to 800°C. Under these conditions, the device was measured both as a resonator and in an oscillator circuit. Results show that the resonant frequency decreases only slightly with increasing temperature and that the insertion loss remains largely stable. In the oscillator circuit, phase noise increases with temperature, primarily due to increased thermal noise. Device performance was also experimentally tested and characterized under X-ray irradiation. Changes in device characteristics and recovery from radiation exposure are currently under study.

This study shows how well aluminum nitride lamb wave resonators perform under extreme environmental stresses, both on their own and as oscillators. Results show very promising applications for frequency control in outer space using AlN MEMS devices.

Thesis Completion Year

2026

Thesis Completion Semester

Spring

Thesis Chair

Lee, Jaesung

College

College of Engineering and Computer Science

Department

Electrical and Computer Engineering

Thesis Discipline

Electrical Engineering

Language

English

Access Status

Open Access

Length of Campus Access

None

Campus Location

Orlando (Main) Campus

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