Study of sputtered tantalum pentoxide and aluminum oxide thin films and their multistacks for embedded capacitor applications

Keywords

Aluminum oxide; Capacitors; Sputtering (Physics); Tantalum; Thin films

Notes

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Graduation Date

2003

Advisor

Sundaram, Kalpathy B.

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Electrical Engineering and Computer Science

Format

Print

Pages

78 p.

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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