Title

Electropolishing of silicon using hydrazine

Abstract

A new electropolishing technique has been investigated for polishing silicon using aqueous hydrazine. p-Type silicon samples are electropolished using this technique and the optimum experimental condition required to achieve this is suggested.

Publication Date

1-1-1997

Publication Title

Journal of Materials Science: Materials in Electronics

Volume

8

Issue

2

Number of Pages

99-101

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1023/A:1018521524681

Socpus ID

0031117499 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0031117499

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