Title
Design And Fabrication Of Slotted Multimode Interference Devices For Chemical And Biological Sensing
Abstract
We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing. Copyright © 2009 M. Mayeh et al.
Publication Date
8-24-2009
Publication Title
Journal of Sensors
Volume
2009
Number of Pages
-
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1155/2009/470175
Copyright Status
Unknown
Socpus ID
68949086307 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/68949086307
STARS Citation
Mayeh, M.; Viegas, J.; Srinivasan, P.; Marques, P.; and Santos, J. L., "Design And Fabrication Of Slotted Multimode Interference Devices For Chemical And Biological Sensing" (2009). Scopus Export 2000s. 11699.
https://stars.library.ucf.edu/scopus2000/11699