Title

Characterization Of Pt - Ru Binary Alloy Thin Films For Work Function Tuning

Keywords

Gate electrode; Metal alloy; Platinum - Ruthenium (Pt - Ru); Work function

Abstract

This letter describes materials and electrical characterization of Pt - Ru binary alloy metal gate electrodes for control of the electrode work function. The work function of the Pt - Ru binary alloy system can be tuned over a wide range of 4.8-5.2 eV. The results indicate that the change of film properties, i.e., resistivity, work function, and crystal structure, with composition is consistent with the equilibrium phase diagram and that the work function in the face-centered cubic and hexagonal close-packed single-phase regions is only weakly dependent on composition, whereas a strong dependence is observed in the intermediate compositional range. © 2006 IEEE.

Publication Date

7-1-2006

Publication Title

IEEE Electron Device Letters

Volume

27

Issue

7

Number of Pages

542-545

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/LED.2006.876326

Socpus ID

33745645893 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33745645893

This document is currently not available here.

Share

COinS