Title

Channel Hot-Electron Degradation On 60-Nm Hfo2-Gated Nmosfet Dc And Rf Performances

Keywords

Flicker noise; Hafnium dioxide; High-k dielectric; Linearity; Noise figure; RF; RF circuit reliability; S-parameters

Abstract

Channel hot-carrier-induced dc and RF performance degradations in 60-nm high-k nMOSFETs are examined experimentally. RF performances such as the cutoff frequency, noise figure, linearity, and flicker noise of high-k MOSFETs show significant vulnerability to the hot-electron effect. Analytical equations for normalized RF degradations relating to the device dc and ac parameters are derived. Good agreement between the analytical predictions and experimental data is obtained. The accuracy of the model equations suggests fast and effective evaluation of noise figure and linearity degradations using simple dc and ac parameters directly. © 2006 IEEE.

Publication Date

5-1-2006

Publication Title

IEEE Transactions on Electron Devices

Volume

53

Issue

5

Number of Pages

1065-1072

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/TED.2006.871837

Socpus ID

33646040708 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33646040708

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