Title

Laser Forming Of Silicon Films Using Nanoparticle Precursor

Keywords

Differential scanning calorimetry (DSC); Laser crystallization; Laser doping; Raman spectroscopy; Schottky diode; SEM; Silicon nanoparticles

Abstract

Polycrystalline silicon films containing cubic silicon crystallites of size 3-4 μm have been formed on nickel substrates by fusing and sintering silicon nanoparticle precursors using a laser. A mechanism for the fusion and sintering of these nanoparticles, resulting in reduced heat input and continuous film formation by surface and grain boundary diffusion, is discussed. Films were characterized by optical microscopy, scanning electron microscopy, energy-dispersive spectroscopy, and Raman spectroscopy. Films were doped with n- as well as p-type dopants by using a laser doping technique and their current-voltage (I-V) characteristics were measured.

Publication Date

5-1-2006

Publication Title

Journal of Electronic Materials

Volume

35

Issue

5

Number of Pages

993-1004

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1007/BF02692559

Socpus ID

33745053664 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33745053664

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