Title
Laser Forming Of Silicon Films Using Nanoparticle Precursor
Keywords
Differential scanning calorimetry (DSC); Laser crystallization; Laser doping; Raman spectroscopy; Schottky diode; SEM; Silicon nanoparticles
Abstract
Polycrystalline silicon films containing cubic silicon crystallites of size 3-4 μm have been formed on nickel substrates by fusing and sintering silicon nanoparticle precursors using a laser. A mechanism for the fusion and sintering of these nanoparticles, resulting in reduced heat input and continuous film formation by surface and grain boundary diffusion, is discussed. Films were characterized by optical microscopy, scanning electron microscopy, energy-dispersive spectroscopy, and Raman spectroscopy. Films were doped with n- as well as p-type dopants by using a laser doping technique and their current-voltage (I-V) characteristics were measured.
Publication Date
5-1-2006
Publication Title
Journal of Electronic Materials
Volume
35
Issue
5
Number of Pages
993-1004
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1007/BF02692559
Copyright Status
Unknown
Socpus ID
33745053664 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/33745053664
STARS Citation
Bet, Sachin and Kar, Aravinda, "Laser Forming Of Silicon Films Using Nanoparticle Precursor" (2006). Scopus Export 2000s. 8650.
https://stars.library.ucf.edu/scopus2000/8650