Title

High Yield Assembly And Electron Transport Investigation Of Semiconducting-Rich Local-Gated Single-Walled Carbon Nanotube Field Effect Transistors

Abstract

We report the fabrication and electron transport investigation of individual local-gated single-walled carbon nanotube field effect transistors (SWNT-FET) with high yield using a semiconducting-rich carbon nanotube solution. The individual semiconducting nanotubes were assembled at the selected position of the circuit via dielectrophoresis. Detailed electron transport investigations on 70 devices show that 99% display good FET behavior, with an average threshold voltage of 1V, subthreshold swing as low as 140mV/dec, and on/off current ratio as high as 8 × 105. The high yield directed assembly of local-gated SWNT-FET will facilitate large scale fabrication of CMOS (complementary metal-oxide-semiconductor) compatible nanoelectronic devices. © IOP Publishing Ltd.

Publication Date

10-14-2011

Publication Title

Nanotechnology

Volume

22

Issue

41

Number of Pages

-

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0957-4484/22/41/415201

Socpus ID

80053229240 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/80053229240

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