Enhanced Performance Of VoX-Based Bolometer Using Patterned Gold Black Absorber

Keywords

absorber; gold black; MEMS; VO bolometer x

Abstract

Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black's near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

Publication Date

1-1-2015

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

9451

Issue

January

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2177401

Socpus ID

84937239215 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84937239215

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