Keywords
EBIC, surface recombination velocity
Abstract
This dissertation will investigate electron beam induced current (EBIC) for determining semiconductor material and device parameters. While previous experimental work on PN junction delineation using EBIC with the scanning electron microscope has resulted in resolution to approximately 10 nm, theoretical study shows the potential use of EBIC for higher resolution (nanometer) PN junction and FET channel length delineation using the transmission electron microscope. Theoretical arguments using computer simulations of electron beam generation volume, collection probability and EBIC were performed and are presented for the purpose of determining EBIC use in a 300 keV transmission electron microscope (TEM) for PN junction depth determination. Measured results indicate that by measuring thin semiconductor samples with high surface recombination velocity and by using a narrow, high-energy electron beam in the STEM mode of a transmission electron microscope, nanometer resolution may be possible. The practical and experimental limits of beam energy and semiconducting material thermal damage will be discussed.
Notes
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Graduation Date
2007
Semester
Fall
Advisor
Malocha, Donald C.
Degree
Doctor of Philosophy (Ph.D.)
College
College of Engineering and Computer Science
Department
Electrical Engineering and Computer Science
Degree Program
Electrical Engineering
Format
application/pdf
Identifier
CFE0001900
URL
http://purl.fcla.edu/fcla/etd/CFE0001900
Language
English
Release Date
December 2007
Length of Campus-only Access
None
Access Status
Doctoral Dissertation (Open Access)
STARS Citation
Hontgas, Christopher Hayden, "Investigation Of Pn Junction Delineation Resolution Using Electron Beam Induced Current" (2007). Electronic Theses and Dissertations. 3208.
https://stars.library.ucf.edu/etd/3208